Problem stsetch 2002-01-26 15:35:38: wafer in loading chamber, cannot vent
enwang at snf.stanford.edu
enwang at snf.stanford.edu
Sat Jan 26 03:35:40 PST 2002
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Problem stsetch 2002-01-23 04:45:24: ICP transfer mode exit error
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Problem stsetch 2002-01-26 15:35:38: wafer in loading chamber, cannot vent
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Problem stsetch 2002-01-23 04:45:24: ICP transfer mode exit error
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Problem stsetch 2002-01-26 15:35:38: wafer in loading chamber, cannot vent
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