Problem stsetch 2002-01-28 05:37:05: software communication problem

parco at snf.stanford.edu parco at snf.stanford.edu
Mon Jan 28 05:37:07 PST 2002


len,
wafer in loading chamber, but did not properly loaded 
unable to unload or vent chamber to restart process.
everything seem fine except software communicating with stsetch.  the sreen showed the loading stage entering the etch chamber, but that's not the case. in addition, its alarming about excessive pump down time alarm.  did not get the opportunity to prime or etch.  the previous user must had some other problems prior. so I decided to put it a shutdown to avoid further complication.




More information about the stsetch-pcs mailing list