Problem stsetch 2002-01-26 16:34:48: wafer removed, chamber vented, works normally
latta at snf.stanford.edu
latta at snf.stanford.edu
Mon Jan 28 11:42:57 PST 2002
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Problem stsetch 2002-01-26 16:34:48: wafer removed, chamber vented, works normally
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Problem stsetch 2002-01-28 05:37:05: software communication problem
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Good job!
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Problem stsetch 2002-01-26 16:34:48: wafer removed, chamber vented, works normally
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Problem stsetch 2002-01-28 05:37:05: software communication problem
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