Problem stsetch 2002-01-26 15:35:38: wafer in loading chamber, cannot vent
latta at snf.stanford.edu
latta at snf.stanford.edu
Mon Jan 28 11:43:10 PST 2002
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Problem stsetch 2002-01-26 15:35:38: wafer in loading chamber, cannot vent
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Problem stsetch 2002-01-26 16:34:48: wafer removed, chamber vented, works normally
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Problem stsetch 2002-01-26 15:35:38: wafer in loading chamber, cannot vent
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Problem stsetch 2002-01-26 16:34:48: wafer removed, chamber vented, works normally
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