From latta at snf.stanford.edu Mon Jul 1 02:28:45 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jul 1, 2002 2:28:45 PM Subject: Shutdown stsetch 2002-07-01 14:28:44: test test Message-ID: sodighoighafoghasfonblvnblcv From latta at snf.stanford.edu Mon Jul 1 02:29:25 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jul 1, 2002 2:29:25 PM Subject: Shutdown stsetch 2002-07-01 14:28:44: test test Message-ID: test. From tims at snf.stanford.edu Thu Jul 4 07:04:10 2002 From: tims at snf.stanford.edu (tims at snf.stanford.edu) Date: Jul 4, 2002 7:04:10 PM Subject: Problem stsetch 2002-07-04 19:04:09: STS loading worm gear failed Message-ID: On loading the wafer the worm gear failed drive failed. Worm gear stopped before wafer made it to chuck. wafer still sitting on tranfer tray. loading window still open No noticable problems before hand. Previous user did long silicon etch? Aborted tranfer. worm gear trying to retract transfer arm but not retracting. From tims at snf.stanford.edu Thu Jul 4 07:04:52 2002 From: tims at snf.stanford.edu (tims at snf.stanford.edu) Date: Jul 4, 2002 7:04:52 PM Subject: Shutdown stsetch 2002-07-04 19:04:52: Message-ID: see problem reported. worm gear transfer has failed. Wafer was not fully loaded and did not make it to the chuck. From tims at snf.stanford.edu Thu Jul 4 07:17:00 2002 From: tims at snf.stanford.edu (tims at snf.stanford.edu) Date: Jul 4, 2002 7:17:00 PM Subject: Shutdown stsetch 2002-07-04 19:16:58: worm gear transfer failed on STS Message-ID: wafer was loaded as usual but did not make it all the way to the chuck. Fingers did not come down. worm gear failed made load noise. hit abort transfer. load noise stopped. worm gear retracted but transfer arm did not retract. From booth at snf.stanford.edu Tue Jul 9 11:46:06 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 9, 2002 11:46:06 AM Subject: Shutdown stsetch 2002-07-04 19:16:58: worm gear transfer failed on STS Message-ID: STS tech replaced lead screw recurculating bearing assy. Checked load operation & adjusted wafer for centering on chuck. Noticed vibration/bouncing of wafer arm during transfer. Will order parts. From booth at snf.stanford.edu Tue Jul 9 11:46:47 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 9, 2002 11:46:47 AM Subject: Shutdown stsetch 2002-07-04 19:04:52: done. Message-ID: From booth at snf.stanford.edu Tue Jul 9 11:46:57 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 9, 2002 11:46:57 AM Subject: Problem stsetch 2002-07-04 19:04:09: STS loading worm gear failed Message-ID: done. From davehong at snf.stanford.edu Mon Jul 15 08:00:23 2002 From: davehong at snf.stanford.edu (davehong at snf.stanford.edu) Date: Jul 15, 2002 8:00:23 PM Subject: Problem stsetch 2002-07-15 20:00:22: hazy etch surface Message-ID: Don't know if it is the etcher or our wafers, the etched surface is hazy with lots of redeposited materials From gyama at snf.stanford.edu Thu Jul 18 04:08:59 2002 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Jul 18, 2002 4:08:59 PM Subject: Problem stsetch 2002-07-18 16:08:59: GPF in mod RE.EXE error Message-ID: From latta at snf.stanford.edu Thu Jul 18 04:43:43 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jul 18, 2002 4:43:43 PM Subject: Problem stsetch 2002-07-18 16:08:59: GPF in mod RE.EXE error Message-ID: Ericp re-booted. System fine.... From haniff at snf.stanford.edu Fri Jul 19 10:59:49 2002 From: haniff at snf.stanford.edu (haniff at snf.stanford.edu) Date: Jul 19, 2002 10:59:49 AM Subject: Problem stsetch 2002-07-19 10:59:48: Message-ID: It appears my wafer has slipped off the backing wafer during the etch. The wafer(s) are still in the chamber. -Tariq From haniff at snf.stanford.edu Fri Jul 19 11:12:36 2002 From: haniff at snf.stanford.edu (haniff at snf.stanford.edu) Date: Jul 19, 2002 11:12:36 AM Subject: Shutdown stsetch 2002-07-19 11:12:35: Message-ID: Wafer has slid off backing wafer. Can not unload From latta at snf.stanford.edu Fri Jul 19 11:30:50 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jul 19, 2002 11:30:50 AM Subject: Problem stsetch 2002-07-19 10:59:48: Message-ID: From latta at snf.stanford.edu Fri Jul 19 11:30:54 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jul 19, 2002 11:30:54 AM Subject: Shutdown stsetch 2002-07-19 11:12:35: Message-ID: From latta at snf.stanford.edu Fri Jul 19 11:31:32 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jul 19, 2002 11:31:32 AM Subject: Shutdown stsetch 2002-07-19 11:31:31: Wafer delaminated in chamber.... Message-ID: From rcrane at snf.stanford.edu Fri Jul 19 06:50:13 2002 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Jul 19, 2002 6:50:13 PM Subject: Shutdown stsetch 2002-07-19 11:31:31: Wafer delaminated in chamber.... Message-ID: removed wafer, wiped down chamber From cbaxter at snf.stanford.edu Mon Jul 22 05:44:24 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jul 22, 2002 5:44:24 PM Subject: Shutdown stsetch 2002-07-22 17:44:22: need to change chiller Message-ID: From cbaxter at snf.stanford.edu Mon Jul 22 06:45:37 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jul 22, 2002 6:45:37 PM Subject: Shutdown stsetch 2002-07-22 17:44:22: need to change chiller Message-ID: chnaged chiller set @18c From cbaxter at snf.stanford.edu Mon Jul 22 06:45:44 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jul 22, 2002 6:45:44 PM Subject: Problem stsetch 2002-07-15 20:00:22: hazy etch surface Message-ID: From davehong at snf.stanford.edu Tue Jul 23 12:41:04 2002 From: davehong at snf.stanford.edu (davehong at snf.stanford.edu) Date: Jul 23, 2002 12:41:04 PM Subject: Problem stsetch 2002-07-23 12:41:03: white crud on the backside of wafers Message-ID: few problems during my etch - white crud on wafer backside after etch .... quite a bit - unstable helium flow + pressure even though I have flat wafer backside - hazy etch surface (redeposition of materials?) From peter at snf.stanford.edu Tue Jul 23 05:35:40 2002 From: peter at snf.stanford.edu (peter at snf.stanford.edu) Date: Jul 23, 2002 5:35:40 PM Subject: Shutdown stsetch 2002-07-23 17:35:40: hazzy surface crud on the backside Message-ID: From cbaxter at snf.stanford.edu Tue Jul 23 11:15:22 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jul 23, 2002 11:15:22 PM Subject: Shutdown stsetch 2002-07-23 17:35:40: hazzy surface crud on the backside Message-ID: vented chamber and scotbrite chuck surface without removing it. found pieces of wafer chips under the spider lifter. cleaned all four pieces of ceramic and wafer carrier ran 20mins of o2 clean and 20mins of deep recipe. checked both wafers and back of wafers are clean. From cbaxter at snf.stanford.edu Tue Jul 23 11:15:32 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jul 23, 2002 11:15:32 PM Subject: Problem stsetch 2002-07-23 12:41:03: white crud on the backside of wafers Message-ID: From lwpan at snf.stanford.edu Wed Jul 24 01:49:35 2002 From: lwpan at snf.stanford.edu (lwpan at snf.stanford.edu) Date: Jul 24, 2002 1:49:35 AM Subject: Shutdown stsetch 2002-07-24 01:49:33: Broken wafer in the chamber Message-ID: Wafer is broken in the chamber. Machine is down. From booth at snf.stanford.edu Wed Jul 24 02:46:03 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 24, 2002 2:46:03 PM Subject: Shutdown stsetch 2002-07-24 01:49:33: Broken wafer in the chamber Message-ID: cleaned up broken wafer from lwpan. He etched completely through the 300micron device wafer, and through the 500 micron carrier wafer it was bonded to, and into the Helium lip seal and the chuck (deposited crud). I disassembled chuck & scrubbed clean, reassembled it & cleaned LoadLock of wafer pieces. Ran 30 min O2 plasma - OK Helium pressure steady at 9.82 Torr, flow about 2.4 sccm. From gyama at snf.stanford.edu Thu Jul 25 03:18:38 2002 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Jul 25, 2002 3:18:38 PM Subject: Problem stsetch 2002-07-25 15:18:37: GPF in mod. RE.EXE recipe ed Message-ID: From cbaxter at snf.stanford.edu Thu Jul 25 08:14:21 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jul 25, 2002 8:14:21 PM Subject: Problem stsetch 2002-07-25 15:18:37: GPF in mod. RE.EXE recipe ed Message-ID: