Problem stsetch 2002-07-04 19:04:09: STS loading worm gear failed

tims at snf.stanford.edu tims at snf.stanford.edu
Thu Jul 4 07:04:10 PDT 2002


 On loading the wafer the worm gear failed drive failed.
Worm gear stopped before wafer made it to chuck.
wafer still sitting on tranfer tray.  loading window still open
No noticable problems before hand.  Previous user 
did long silicon etch?  Aborted tranfer.  worm gear trying
to retract transfer arm but not retracting. 




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