Shutdown stsetch 2002-07-04 19:16:58: worm gear transfer failed on STS

tims at snf.stanford.edu tims at snf.stanford.edu
Thu Jul 4 07:17:00 PDT 2002


wafer was loaded as usual but did not make it all the way
to the chuck. Fingers did not come down.  worm gear
failed made load noise.  hit abort transfer.  load noise
stopped. worm gear retracted but transfer arm did not
retract. 




More information about the stsetch-pcs mailing list