Shutdown stsetch 2002-07-04 19:16:58: worm gear transfer failed on STS

[tims at snf.stanford.edu]

wafer was loaded as usual but did not make it all the way
to the chuck. Fingers did not come down.  worm gear
failed made load noise.  hit abort transfer.  load noise
stopped. worm gear retracted but transfer arm did not
retract.