Shutdown stsetch 2002-07-04 19:16:58: worm gear transfer failed on STS

booth at snf.stanford.edu booth at snf.stanford.edu
Tue Jul 9 11:46:06 PDT 2002


STS tech replaced lead screw recurculating bearing assy.
Checked load operation & adjusted wafer for centering
on chuck.
Noticed vibration/bouncing of wafer arm during transfer.
Will order parts.




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