Shutdown stsetch 2002-07-19 11:31:31: Wafer delaminated in chamber....
rcrane at snf.stanford.edu
rcrane at snf.stanford.edu
Fri Jul 19 06:50:13 PDT 2002
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Shutdown stsetch 2002-07-19 11:31:31: Wafer delaminated in chamber....
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removed wafer, wiped down chamber
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Shutdown stsetch 2002-07-19 11:31:31: Wafer delaminated in chamber....
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Shutdown stsetch 2002-07-22 17:44:22: need to change chiller
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