Problem stsetch 2002-07-23 12:41:03: white crud on the backside of wafers

davehong at snf.stanford.edu davehong at snf.stanford.edu
Tue Jul 23 12:41:04 PDT 2002


few problems during my etch
- white crud on wafer backside after etch .... quite a bit
- unstable helium flow + pressure even though I have flat wafer backside
- hazy etch surface (redeposition of materials?)




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