Shutdown stsetch 2002-07-23 17:35:40: hazzy surface crud on the backside

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Tue Jul 23 11:15:22 PDT 2002


vented chamber and scotbrite chuck surface without
removing it. found pieces of wafer chips under the spider
lifter. cleaned all four pieces of ceramic and wafer carrier
ran 20mins of o2 clean and 20mins of deep recipe. checked
both wafers and back of wafers are clean.




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