Shutdown stsetch 2002-07-24 01:49:33: Broken wafer in the chamber
lwpan at snf.stanford.edu
lwpan at snf.stanford.edu
Wed Jul 24 01:49:35 PDT 2002
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Problem stsetch 2002-07-23 12:41:03: white crud on the backside of wafers
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Shutdown stsetch 2002-07-24 01:49:33: Broken wafer in the chamber
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Wafer is broken in the chamber. Machine is down.
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Problem stsetch 2002-07-23 12:41:03: white crud on the backside of wafers
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Shutdown stsetch 2002-07-24 01:49:33: Broken wafer in the chamber
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