July 2002 Archives by subject

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Starting: Mon Jul 1 02:28:45 PDT 2002
Ending: Thu Jul 25 08:14:21 PDT 2002
Messages: 28

• Problem stsetch 2002-07-04 19:04:09: STS loading worm gear failed   tims at snf.stanford.edu
• Problem stsetch 2002-07-04 19:04:09: STS loading worm gear failed   booth at snf.stanford.edu
• Problem stsetch 2002-07-15 20:00:22: hazy etch surface   davehong at snf.stanford.edu
• Problem stsetch 2002-07-15 20:00:22: hazy etch surface   cbaxter at snf.stanford.edu
• Problem stsetch 2002-07-18 16:08:59: GPF in mod RE.EXE error   gyama at snf.stanford.edu
• Problem stsetch 2002-07-18 16:08:59: GPF in mod RE.EXE error   latta at snf.stanford.edu
• Problem stsetch 2002-07-19 10:59:48:   haniff at snf.stanford.edu
• Problem stsetch 2002-07-19 10:59:48:   latta at snf.stanford.edu
• Problem stsetch 2002-07-23 12:41:03: white crud on the backside of wafers   cbaxter at snf.stanford.edu
• Problem stsetch 2002-07-23 12:41:03: white crud on the backside of wafers   davehong at snf.stanford.edu
• Problem stsetch 2002-07-25 15:18:37: GPF in mod. RE.EXE recipe ed   gyama at snf.stanford.edu
• Problem stsetch 2002-07-25 15:18:37: GPF in mod. RE.EXE recipe ed   cbaxter at snf.stanford.edu
• Shutdown stsetch 2002-07-01 14:28:44: test test   latta at snf.stanford.edu
• Shutdown stsetch 2002-07-01 14:28:44: test test   latta at snf.stanford.edu
• Shutdown stsetch 2002-07-04 19:04:52:   tims at snf.stanford.edu
• Shutdown stsetch 2002-07-04 19:04:52: done.   booth at snf.stanford.edu
• Shutdown stsetch 2002-07-04 19:16:58: worm gear transfer failed on STS   tims at snf.stanford.edu
• Shutdown stsetch 2002-07-04 19:16:58: worm gear transfer failed on STS   booth at snf.stanford.edu
• Shutdown stsetch 2002-07-19 11:12:35:   haniff at snf.stanford.edu
• Shutdown stsetch 2002-07-19 11:12:35:   latta at snf.stanford.edu
• Shutdown stsetch 2002-07-19 11:31:31: Wafer delaminated in chamber....   rcrane at snf.stanford.edu
• Shutdown stsetch 2002-07-19 11:31:31: Wafer delaminated in chamber....   latta at snf.stanford.edu
• Shutdown stsetch 2002-07-22 17:44:22: need to change chiller   cbaxter at snf.stanford.edu
• Shutdown stsetch 2002-07-22 17:44:22: need to change chiller   cbaxter at snf.stanford.edu
• Shutdown stsetch 2002-07-23 17:35:40: hazzy surface crud on the backside   peter at snf.stanford.edu
• Shutdown stsetch 2002-07-23 17:35:40: hazzy surface crud on the backside   cbaxter at snf.stanford.edu
• Shutdown stsetch 2002-07-24 01:49:33: Broken wafer in the chamber   lwpan at snf.stanford.edu
• Shutdown stsetch 2002-07-24 01:49:33: Broken wafer in the chamber   booth at snf.stanford.edu

Last message date: Thu Jul 25 08:14:21 PDT 2002
Archived on: Fri Jan 11 13:11:09 PST 2013

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