From xjzhang at snf.stanford.edu Thu Jun 6 01:08:20 2002 From: xjzhang at snf.stanford.edu (xjzhang at snf.stanford.edu) Date: Jun 6, 2002 1:08:20 PM Subject: Comment stsetch 2002-06-06 13:08:20: Message-ID: From latta at snf.stanford.edu Thu Jun 20 12:31:56 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jun 20, 2002 12:31:56 PM Subject: Problem stsetch 2002-06-20 12:31:54: Platen pwr outa tol;SMOODEEP Message-ID: Got an error message that pla`ten power was out of tolerence during SMOODEEP recipe. Ste for 12 W w// 90% tolerance. From latta at snf.stanford.edu Thu Jun 20 12:32:14 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jun 20, 2002 12:32:14 PM Subject: Problem stsetch 2002-06-20 12:32:14: Loadlock pumping down slowly.... Message-ID: From booth at snf.stanford.edu Thu Jun 20 12:45:29 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 20, 2002 12:45:29 PM Subject: Shutdown stsetch 2002-06-20 12:45:26: RF & LoadLock pumping not normal Message-ID: From cbaxter at snf.stanford.edu Thu Jun 20 08:35:09 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 20, 2002 8:35:09 PM Subject: Shutdown stsetch 2002-06-20 12:45:26: RF & LoadLock pumping not normal Message-ID: chiller is dead on water and load lock pump down at normal time. installed spare chiller was originally use for drytek. cb5 breaker on sts was rated for 16amp new chiller rated for 18amp. had to wire rebuild chiller to spare 30amp outlet. chiller temporary not feed by sts remote ac. From cbaxter at snf.stanford.edu Thu Jun 20 08:35:17 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 20, 2002 8:35:17 PM Subject: Problem stsetch 2002-06-20 12:32:14: Loadlock pumping down slowly.... Message-ID: From cbaxter at snf.stanford.edu Thu Jun 20 08:35:21 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 20, 2002 8:35:21 PM Subject: Problem stsetch 2002-06-20 12:31:54: Platen pwr outa tol;SMOODEEP Message-ID: From harshal at snf.stanford.edu Mon Jun 24 09:58:02 2002 From: harshal at snf.stanford.edu (harshal at snf.stanford.edu) Date: Jun 24, 2002 9:58:02 PM Subject: Problem stsetch 2002-06-24 21:58:01: STS Unloading problem. Message-ID: i was trying to etch a wafer that was mounted on another wafer with photoresist in between them. as i was about to load the wafers, the working wafer surface developed some cracks and hence i immediately aborted the loading process. so THE WAFER DID NOT GO INTO THE PROCESS CHAMBER. but now as i tried to unload the wafer, the pressure in the loading chamber would not come up with the rate as it usually does. the pressure is coming up extremely slowly. i m not sure if there is a way to have the system vented in any other way. hence i disabled the system and would wait for advice untill tomorrow morning. From ericp at snf.stanford.edu Tue Jun 25 12:52:48 2002 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Jun 25, 2002 12:52:48 AM Subject: Problem stsetch 2002-06-25 00:52:48: Venting/loading ok now Message-ID: STS venting ok. It seemed to have a few alarms that needed to be cleared. (why more than one, I don't know) Once I cleared these alarms, it gave me the vent option, and I was able to vent normally. Wafer coming out was intact- no pieces to worry about. The machine is operating normally now. -Eric From booth at snf.stanford.edu Tue Jun 25 06:17:51 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 25, 2002 6:17:51 AM Subject: Problem stsetch 2002-06-25 00:52:48: Venting/loading ok now Message-ID: checked by EricP From booth at snf.stanford.edu Tue Jun 25 06:18:03 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 25, 2002 6:18:03 AM Subject: Problem stsetch 2002-06-24 21:58:01: STS Unloading problem. Message-ID: checked by EricP