Problem stsetch 2002-06-20 12:31:54: Platen pwr outa tol;SMOODEEP

latta at snf.stanford.edu latta at snf.stanford.edu
Thu Jun 20 12:31:56 PDT 2002


Got an error message that pla`ten power was out of tolerence
during SMOODEEP recipe.  Ste for 12 W w// 90% tolerance.




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