Shutdown stsetch 2002-06-20 12:45:26: RF & LoadLock pumping not normal
booth at snf.stanford.edu
booth at snf.stanford.edu
Thu Jun 20 12:45:29 PDT 2002
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Problem stsetch 2002-06-20 12:32:14: Loadlock pumping down slowly....
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Shutdown stsetch 2002-06-20 12:45:26: RF & LoadLock pumping not normal
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Shutdown stsetch 2002-06-20 12:45:26: RF & LoadLock pumping not normal
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