Problem stsetch 2002-06-25 00:52:48: Venting/loading ok now

ericp at snf.stanford.edu ericp at snf.stanford.edu
Tue Jun 25 12:52:48 PDT 2002


STS venting ok.  It seemed to have a few alarms 
that needed to be cleared.  (why more than one, 
I don't know)  Once I cleared these alarms, it gave 
me the vent option, and I was able to vent normally. 
Wafer coming out was intact-  no pieces to worry about. 
The machine is operating normally now. 
-Eric




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