From acopland at snf.stanford.edu Thu Mar 7 02:10:25 2002 From: acopland at snf.stanford.edu (acopland at snf.stanford.edu) Date: Mar 7, 2002 2:10:25 AM Subject: Problem stsetch 2002-03-07 02:10:24: shutdown software - wafer left in load chamber Message-ID: i accidentally shut down the software after loading a wafer to be processed. can't restart without password, so wafer is still in the load chamber jeremy cheng acopland (650)387-1546 From hphan at snf.stanford.edu Thu Mar 7 07:39:49 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Mar 7, 2002 7:39:49 AM Subject: Problem stsetch 2002-03-07 02:10:24: Enter Password and It Working now Message-ID: From booth at snf.stanford.edu Tue Mar 12 10:05:54 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 12, 2002 10:05:54 AM Subject: Shutdown stsetch 2002-03-12 10:05:52: maintenance work. Message-ID: From booth at snf.stanford.edu Tue Mar 12 11:57:12 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 12, 2002 11:57:12 AM Subject: Shutdown stsetch 2002-03-12 10:05:52: maintenance work. Message-ID: Tech will return next week? with more wiring info, to eliminate the ion guage fault that causes the system software to hang. From latta at snf.stanford.edu Wed Mar 20 12:32:11 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Mar 20, 2002 12:32:11 PM Subject: Problem stsetch 2002-03-20 12:32:09: Load lock pumping down slowwwly. Message-ID: From booth at snf.stanford.edu Thu Mar 21 07:26:41 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 21, 2002 7:26:41 AM Subject: Shutdown stsetch 2002-03-21 07:26:41: communications failure Message-ID: From booth at snf.stanford.edu Thu Mar 21 12:05:32 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 21, 2002 12:05:32 PM Subject: Shutdown stsetch 2002-03-21 07:26:41: communications failure Message-ID: worked with Mike from STS to change cabling so that Application software does not need to communicate with the ion guage controller. Removed Ion Guage controller & guage head from system, & verified normal operation. From quickwin at snf.stanford.edu Sun Mar 24 04:04:10 2002 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Mar 24, 2002 4:04:10 PM Subject: Problem stsetch 2002-03-24 16:04:09: communications lost Message-ID: I was trying to create a multi-step process when the machine suddenly lost communication and entered local mode. It does not accept command afterward. From booth at snf.stanford.edu Mon Mar 25 08:00:01 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 25, 2002 8:00:01 AM Subject: Problem stsetch 2002-03-24 16:04:09: communications lost Message-ID: looks normal this morning. No action required by me.