Problem stsetch 2002-03-07 02:10:24: shutdown software - wafer left in load chamber

acopland at snf.stanford.edu acopland at snf.stanford.edu
Thu Mar 7 02:10:25 PST 2002


i accidentally shut down the software after loading a wafer to be processed.  can't restart without password, so wafer is still in the load chamber
jeremy cheng
acopland
(650)387-1546




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