From mislam at snf.stanford.edu  Wed May  1 02:52:35 2002
From: mislam at snf.stanford.edu (mislam at snf.stanford.edu)
Date: May 1, 2002 2:52:35 PM
Subject: Shutdown stsetch 2002-05-01 14:52:35: broken piece observed inside
Message-ID: <mailman.530.1357938645.25867.stsetch-pcs@snf.stanford.edu>

Afte loading wafer, saw a small piece of Si inside
reactor. Unloaded wafer and checked, was not
from my wafer.



From cbaxter at snf.stanford.edu  Wed May  1 05:17:09 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: May 1, 2002 5:17:09 PM
Subject: Shutdown stsetch 2002-05-01 14:52:35: broken piece observed inside
Message-ID: <mailman.531.1357938645.25867.stsetch-pcs@snf.stanford.edu>

vented chamber and vacuum broken wafer chips. it looks
like this someone broke a wafer and did not report it on coral
wafer chips was all over the chamber.



From bchui at snf.stanford.edu  Wed May  1 09:14:48 2002
From: bchui at snf.stanford.edu (bchui at snf.stanford.edu)
Date: May 1, 2002 9:14:48 PM
Subject: Shutdown stsetch 2002-05-01 21:14:48: wafer debris inside chamber
Message-ID: <mailman.532.1357938645.25867.stsetch-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Wed May  1 10:03:36 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: May 1, 2002 10:03:36 PM
Subject: Shutdown stsetch 2002-05-01 21:14:48: wafer debris inside chamber
Message-ID: <mailman.533.1357938645.25867.stsetch-pcs@snf.stanford.edu>

for the second time today. vented chamber and vacuum
wafer chips.. wafer was too thin



From booth at snf.stanford.edu  Fri May  3 07:21:33 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: May 3, 2002 7:21:33 AM
Subject: Shutdown stsetch 2002-05-03 07:21:32: Need to change SF6 gas bottle.
Message-ID: <mailman.534.1357938645.25867.stsetch-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Fri May  3 07:41:34 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: May 3, 2002 7:41:34 AM
Subject: Shutdown stsetch 2002-05-03 07:21:32: Need to change SF6 gas bottle.
Message-ID: <mailman.535.1357938645.25867.stsetch-pcs@snf.stanford.edu>

New SF6 gas bottle installed.



From acopland at snf.stanford.edu  Sun May  5 06:15:49 2002
From: acopland at snf.stanford.edu (acopland at snf.stanford.edu)
Date: May 5, 2002 6:15:49 PM
Subject: Problem stsetch 2002-05-05 18:15:48: ICP serial communication failure alarm
Message-ID: <mailman.536.1357938645.25867.stsetch-pcs@snf.stanford.edu>

after wafer succesfully loaded but before processing



From ericp at snf.stanford.edu  Sun May  5 07:36:29 2002
From: ericp at snf.stanford.edu (ericp at snf.stanford.edu)
Date: May 5, 2002 7:36:29 PM
Subject: Problem stsetch 2002-05-05 19:36:27: Machine ok now
Message-ID: <mailman.537.1357938645.25867.stsetch-pcs@snf.stanford.edu>

Reset. 



From booth at snf.stanford.edu  Mon May  6 06:42:14 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: May 6, 2002 6:42:14 AM
Subject: Problem stsetch 2002-05-05 19:36:27: Machine ok now
Message-ID: <mailman.538.1357938645.25867.stsetch-pcs@snf.stanford.edu>

verified.



From booth at snf.stanford.edu  Mon May  6 08:26:53 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: May 6, 2002 8:26:53 AM
Subject: Problem stsetch 2002-05-05 18:15:48: ICP serial communication failure alarm
Message-ID: <mailman.539.1357938645.25867.stsetch-pcs@snf.stanford.edu>

cleared.



From booth at snf.stanford.edu  Tue May 14 08:17:44 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: May 14, 2002 8:17:44 AM
Subject: Shutdown stsetch 2002-05-14 08:17:44: F-318 bottle changeout
Message-ID: <mailman.540.1357938645.25867.stsetch-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Tue May 14 08:54:50 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: May 14, 2002 8:54:50 AM
Subject: Shutdown stsetch 2002-05-14 08:17:44: F-318 bottle changeout
Message-ID: <mailman.541.1357938645.25867.stsetch-pcs@snf.stanford.edu>

done.