Shutdown stsetch 2002-05-01 14:52:35: broken piece observed inside

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Wed May 1 05:17:09 PDT 2002


vented chamber and vacuum broken wafer chips. it looks
like this someone broke a wafer and did not report it on coral
wafer chips was all over the chamber.




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