Shutdown stsetch 2002-05-03 07:21:32: Need to change SF6 gas bottle.
booth at snf.stanford.edu
booth at snf.stanford.edu
Fri May 3 07:21:33 PDT 2002
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Shutdown stsetch 2002-05-01 21:14:48: wafer debris inside chamber
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Shutdown stsetch 2002-05-03 07:21:32: Need to change SF6 gas bottle.
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