Problem stsetch 2002-11-19 13:22:45: He flow/Pressure out of range

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Tue Nov 19 01:22:47 PST 2002


the He flow and pressure go out of range once the gas stablization starts.  I tried a different wafer, and had the same problem. I have removed my wafer.




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