Problem stsetch 2002-11-19 13:22:45: He flow/Pressure out of range

lindaw at lindaw at
Tue Nov 19 01:22:47 PST 2002

the He flow and pressure go out of range once the gas stablization starts.  I tried a different wafer, and had the same problem. I have removed my wafer.

More information about the stsetch-pcs mailing list