Shutdown stsetch 2002-11-19 13:46:19: Sliver of Si on chuck
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Tue Nov 19 06:39:23 PST 2002
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Shutdown stsetch 2002-11-19 13:46:19: Sliver of Si on chuck
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Problem stsetch 2002-11-20 22:05:25: Random stops, ICP not found error
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vented chamber and removed wafer chips
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Shutdown stsetch 2002-11-19 13:46:19: Sliver of Si on chuck
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Problem stsetch 2002-11-20 22:05:25: Random stops, ICP not found error
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