October 2002 Archives by thread

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Starting: Tue Oct 1 06:55:52 PDT 2002
Ending: Wed Oct 23 05:47:41 PDT 2002
Messages: 18

• Shutdown stsetch 2002-10-01 06:55:51: LoadLock maintenance   booth at snf.stanford.edu
  • Shutdown stsetch 2002-10-01 06:55:51: LoadLock maintenance   booth at snf.stanford.edu
• Shutdown stsetch 2002-10-04 01:11:51: wafer piece left inside STS main chamber   qtang at snf.stanford.edu
  • Shutdown stsetch 2002-10-04 01:11:51: wafer piece left inside STS main chamber   booth at snf.stanford.edu
• Problem stsetch 2002-10-06 21:54:55: load lock problem, wfr trapped   bchui at snf.stanford.edu
  • Problem stsetch 2002-10-06 21:54:55: load lock problem, wfr trapped   booth at snf.stanford.edu
• Problem stsetch 2002-10-06 10:21:03:   haniff at snf.stanford.edu
  • Problem stsetch 2002-10-06 10:21:03:   booth at snf.stanford.edu
• Problem stsetch 2002-10-07 16:18:17: sts load lock   amyers at snf.stanford.edu
  • Problem stsetch 2002-10-07 16:18:17: sts load lock   cbaxter at snf.stanford.edu
• Problem stsetch 2002-10-08 09:36:36: Load lock pump down too slow   jdas at snf.stanford.edu
  • Problem stsetch 2002-10-08 09:36:36: Load lock pump down too slow   booth at snf.stanford.edu
• Shutdown stsetch 2002-10-08 09:50:11: excessive load lock pumpdown delay   haniff at snf.stanford.edu
  • Shutdown stsetch 2002-10-08 09:50:11: excessive load lock pumpdown delay   booth at snf.stanford.edu
• Comment stsetch 2002-10-10 20:59:49: STS free 0:00am-   xjzhang at snf.stanford.edu
• Comment stsetch 2002-10-10 21:00:18: STS free Fri. 0:00am to 4:30am   xjzhang at snf.stanford.edu
• Shutdown stsetch 2002-10-23 15:08:34: wafer was broken in the chamber   lwpan at snf.stanford.edu
  • Shutdown stsetch 2002-10-23 15:08:34: wafer was broken in the chamber   cbaxter at snf.stanford.edu

Last message date: Wed Oct 23 05:47:41 PDT 2002
Archived on: Fri Jan 11 13:11:10 PST 2013

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