From mislam at snf.stanford.edu Mon Sep 2 07:12:33 2002 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sep 2, 2002 7:12:33 AM Subject: Comment stsetch 2002-09-02 07:12:32: Recipe editor OK Message-ID: Please ignore my previously reported problem with recipe editor. The problem seems to have disappeared. Thanks From qtang at snf.stanford.edu Tue Sep 3 06:06:04 2002 From: qtang at snf.stanford.edu (qtang at snf.stanford.edu) Date: Sep 3, 2002 6:06:04 AM Subject: Shutdown stsetch 2002-09-03 06:06:04: a quarter of wafer left in chamber between 2 holding pins Message-ID: Although I followed the instruction for preparing etching pieces by bonding them to a 4" wafer, they become loose at the beginning of my 5min processing. I aborted and unloaded, but found one piece left in chamber between two holding pins. It can be seen by using a flash light. I don't know why the bonding was bad. I am sure I followed the instruction strictly. Sorry about this. From latta at snf.stanford.edu Tue Sep 3 12:53:12 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sep 3, 2002 12:53:12 PM Subject: Problem stsetch 2002-08-31 10:37:18: can't edit recipe Message-ID: Eric cleared. From latta at snf.stanford.edu Tue Sep 3 12:53:20 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sep 3, 2002 12:53:20 PM Subject: Problem stsetch 2002-08-31 19:50:34: Recipie Edit ok now Message-ID: Thanks! From cbaxter at snf.stanford.edu Tue Sep 3 05:00:49 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 3, 2002 5:00:49 PM Subject: Shutdown stsetch 2002-09-03 06:06:04: a quarter of wafer left in chamber between 2 holding pins Message-ID: Len cleaned the chamber and ran o2 clean. I season the chamber using deep recipe. From dtchang at snf.stanford.edu Wed Sep 4 05:50:02 2002 From: dtchang at snf.stanford.edu (dtchang at snf.stanford.edu) Date: Sep 4, 2002 5:50:02 PM Subject: Problem stsetch 2002-09-04 17:50:01: cannot heat the right Message-ID: From cbaxter at snf.stanford.edu Wed Sep 4 06:10:16 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 4, 2002 6:10:16 PM Subject: Problem stsetch 2002-09-04 17:50:01: cannot heat the right Message-ID: wrong equipment From jdas at snf.stanford.edu Tue Sep 17 08:54:22 2002 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: Sep 17, 2002 8:54:22 AM Subject: Problem stsetch 2002-09-17 08:54:22: ICP communication failure Message-ID: toll stoped communicating end of a process,An wafer is inside the chamber From jdas at snf.stanford.edu Tue Sep 17 09:17:48 2002 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: Sep 17, 2002 9:17:48 AM Subject: Shutdown stsetch 2002-09-17 09:17:47: communication failure Message-ID: From booth at snf.stanford.edu Tue Sep 17 09:18:25 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 17, 2002 9:18:25 AM Subject: Problem stsetch 2002-09-17 08:54:22: ICP communication failure Message-ID: this should be a shutdown. From booth at snf.stanford.edu Tue Sep 17 09:18:59 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 17, 2002 9:18:59 AM Subject: Shutdown stsetch 2002-09-17 09:17:47: communication failure Message-ID: restarted system software, removed John's wafer. From booth at snf.stanford.edu Wed Sep 25 11:25:34 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 25, 2002 11:25:34 AM Subject: Shutdown stsetch 2002-09-25 11:25:33: check for leak in pump line Message-ID: From cbaxter at snf.stanford.edu Wed Sep 25 04:52:02 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 25, 2002 4:52:02 PM Subject: Shutdown stsetch 2002-09-25 11:25:33: check for leak in pump line Message-ID: foreline was cleaned by Len. I removed gate valve by pass control. Ramp up turbo and ran 10 mins o2 clean