Problem stsetch 2002-08-31 10:37:18: can't edit recipe

latta at snf.stanford.edu latta at snf.stanford.edu
Tue Sep 3 12:53:12 PDT 2002

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Eric cleared.

Previous message: Shutdown stsetch 2002-09-03 06:06:04: a quarter of wafer left in chamber between 2 holding pins
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