From latta at snf.stanford.edu  Thu Apr  3 03:45:42 2003
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Apr 3, 2003 3:45:42 PM
Subject: Shutdown stsetch 2003-04-03 15:45:42: Report Shutdown for stsetch
Message-ID: <mailman.709.1357938647.25867.stsetch-pcs@snf.stanford.edu>

User found tip of the clamp finger on his wafer.  He was using the holder.
Turbo spinning down for repair....



From cbaxter at snf.stanford.edu  Thu Apr  3 05:55:00 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Apr 3, 2003 5:55:00 PM
Subject: Shutdown stsetch 2003-04-03 15:45:42: Report Clear for stsetch
Message-ID: <mailman.710.1357938647.25867.stsetch-pcs@snf.stanford.edu>

vented chamber and changed ceramic finger  and top
lid oring. Eric run 30mins o2 clean



From sgraham at snf.stanford.edu  Fri Apr 11 06:53:04 2003
From: sgraham at snf.stanford.edu (sgraham at snf.stanford.edu)
Date: Apr 11, 2003 6:53:04 AM
Subject: Shutdown stsetch 2003-04-11 06:53:01: Report Shutdown for stsetch
Message-ID: <mailman.711.1357938647.25867.stsetch-pcs@snf.stanford.edu>

broken wafer:  550 um handle wafer, 200um device wafer.  Device wafer broke near end of through etch process



From latta at snf.stanford.edu  Fri Apr 11 12:51:20 2003
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Apr 11, 2003 12:51:20 PM
Subject: Shutdown stsetch 2003-04-11 06:53:01: Report Clear for stsetch
Message-ID: <mailman.712.1357938647.25867.stsetch-pcs@snf.stanford.edu>

Len cleaned out broken wafer, replace lipseal and generally cleaned up chuck and chamber from gunk.
O2CLEAN program tun fro 60 mins.



From cbaxter at snf.stanford.edu  Tue Apr 22 05:40:36 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Apr 22, 2003 5:40:36 PM
Subject: Shutdown stsetch 2003-04-22 17:40:33: Report Shutdown for stsetch
Message-ID: <mailman.713.1357938647.25867.stsetch-pcs@snf.stanford.edu>

shutdown for 30mins, routin maint.



From cbaxter at snf.stanford.edu  Tue Apr 22 05:54:24 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Apr 22, 2003 5:54:24 PM
Subject: Shutdown stsetch 2003-04-22 17:40:33: Report Clear for stsetch
Message-ID: <mailman.714.1357938647.25867.stsetch-pcs@snf.stanford.edu>

add fomblin oil on main pump



From booth at snf.stanford.edu  Fri Apr 25 01:08:19 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Apr 25, 2003 1:08:19 PM
Subject: Shutdown stsetch 2003-04-25 13:08:19: Report Shutdown for stsetch
Message-ID: <mailman.715.1357938647.25867.stsetch-pcs@snf.stanford.edu>

short shutdown for maintenance



From booth at snf.stanford.edu  Fri Apr 25 01:41:18 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Apr 25, 2003 1:41:18 PM
Subject: Shutdown stsetch 2003-04-25 13:08:19: Report Clear for stsetch
Message-ID: <mailman.716.1357938647.25867.stsetch-pcs@snf.stanford.edu>

completed maintenancfe test.