From mislam at snf.stanford.edu Fri Aug 8 07:22:27 2003 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Aug 8, 2003 7:22:27 AM Subject: Problem stsetch 2003-08-08 07:22:26: He flow unstable, dusty particles in chamber Message-ID: Observed tiny particles around the wafer seal in the chamber. This is probabily effecting He flow and wafer cooling. He flow is little high and unstable with even clean wafer. From booth at snf.stanford.edu Fri Aug 8 10:26:37 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 8, 2003 10:26:37 AM Subject: Shutdown stsetch 2003-08-08 10:26:37: Report Shutdown for stsetch Message-ID: Maintenance needed to rrepair backside Helium flow / debris in etch chamber. From cbaxter at snf.stanford.edu Fri Aug 8 12:58:17 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 8, 2003 12:58:17 PM Subject: Shutdown stsetch 2003-08-08 10:26:37: Report Clear for stsetch Message-ID: Len vented the chamber and changed the lip seal oring. I ran 30mins o2 plasma clean From cbaxter at snf.stanford.edu Fri Aug 8 12:58:34 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 8, 2003 12:58:34 PM Subject: Problem stsetch 2003-08-08 07:22:26: Report Clear for stsetch Message-ID: From daesung at snf.stanford.edu Fri Aug 22 12:00:46 2003 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Aug 22, 2003 12:00:46 AM Subject: Shutdown stsetch 2003-08-22 00:00:45: Wafer pieces in chamber Message-ID: From latta at snf.stanford.edu Fri Aug 22 10:01:26 2003 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Aug 22, 2003 10:01:26 AM Subject: Shutdown stsetch 2003-08-22 00:00:45: Report Clear for stsetch Message-ID: Len cleaned up peices, contacted user and ran O2CLEAN. From afreeman at snf.stanford.edu Wed Aug 27 11:37:39 2003 From: afreeman at snf.stanford.edu (afreeman at snf.stanford.edu) Date: Aug 27, 2003 11:37:39 AM Subject: Problem stsetch 2003-08-27 11:37:39: Report Problem for stsetch Message-ID: Communications lost. shutdown From afreeman at snf.stanford.edu Wed Aug 27 11:38:30 2003 From: afreeman at snf.stanford.edu (afreeman at snf.stanford.edu) Date: Aug 27, 2003 11:38:30 AM Subject: Shutdown stsetch 2003-08-27 11:38:29: Report Shutdown for stsetch Message-ID: icp cannot come on From booth at snf.stanford.edu Wed Aug 27 12:19:41 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 27, 2003 12:19:41 PM Subject: Shutdown stsetch 2003-08-27 11:38:29: Report Clear for stsetch Message-ID: restarted system software. From booth at snf.stanford.edu Wed Aug 27 12:19:56 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 27, 2003 12:19:56 PM Subject: Problem stsetch 2003-08-27 11:37:39: Report Clear for stsetch Message-ID: same as shutdown From cbaxter at snf.stanford.edu Wed Aug 27 10:09:45 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 27, 2003 10:09:45 PM Subject: Shutdown stsetch 2003-08-27 22:09:45: Report Shutdown for stsetch Message-ID: shutdown for routin maint From cbaxter at snf.stanford.edu Wed Aug 27 10:24:47 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 27, 2003 10:24:47 PM Subject: Shutdown stsetch 2003-08-27 22:09:45: Report Clear for stsetch Message-ID: added fomblin oil on drypump. From gyama at snf.stanford.edu Fri Aug 29 10:02:45 2003 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Aug 29, 2003 10:02:45 AM Subject: Problem stsetch 2003-08-29 10:02:44: Report Problem for stsetch Message-ID: error: platen power out of tol. set for 18w but 0w From gyama at snf.stanford.edu Fri Aug 29 10:29:29 2003 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Aug 29, 2003 10:29:29 AM Subject: Problem stsetch 2003-08-29 10:29:25: Report Problem for stsetch Message-ID: found problem, OK to use From cbaxter at snf.stanford.edu Fri Aug 29 03:55:40 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 29, 2003 3:55:40 PM Subject: Problem stsetch 2003-08-29 10:02:44: Report Clear for stsetch Message-ID: can't duplicate error From cbaxter at snf.stanford.edu Fri Aug 29 03:56:13 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 29, 2003 3:56:13 PM Subject: Problem stsetch 2003-08-29 10:29:25: Report Clear for stsetch Message-ID: