Shutdown stsetch 2003-12-04 16:34:59: STSEtch down

chungchu at chungchu at
Thu Dec 4 16:34:59 PST 2003

An error message was shown when opening Recipe Editor after the wafer was loaded.
"General protection fault in module RE.EXE at 0001:0C43"
Computer lost connection with machine.
Wafer's still in the chamber.

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