Shutdown stsetch 2003-12-04 16:34:59: STSEtch down
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Thu Dec 4 19:37:45 PST 2003
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Shutdown stsetch 2003-12-04 16:34:59: STSEtch down
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Shutdown stsetch 2003-12-09 11:12:05: GEneral Fault Protection Error
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reboot pc and recovered wafer inside the chamber
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Shutdown stsetch 2003-12-04 16:34:59: STSEtch down
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Shutdown stsetch 2003-12-09 11:12:05: GEneral Fault Protection Error
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