Shutdown stsetch 2003-02-18 07:50:34: found wafer piece in chamber

mislam at snf.stanford.edu mislam at snf.stanford.edu
Tue Feb 18 07:50:34 PST 2003


Enabled system and looked inside, saw a small
piece of what seems to be Silicon inside chamber
just by the o-ring. I did not process any wafer.




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