Shutdown stsetch 2003-02-18 07:50:34: found wafer piece in chamber

mislam at mislam at
Tue Feb 18 07:50:34 PST 2003

Enabled system and looked inside, saw a small
piece of what seems to be Silicon inside chamber
just by the o-ring. I did not process any wafer.

More information about the stsetch-pcs mailing list