Shutdown stsetch 2003-02-18 07:50:34: found wafer piece in chamber

booth at snf.stanford.edu booth at snf.stanford.edu
Tue Feb 18 01:31:20 PST 2003


cleaned broken wafer pieces from etch chamber.
Replaced worn 4-40 screws at chamber lid t/c 
connector.  Ran O2clean on dummy wafer for
1 hour.




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