Shutdown stsetch 2003-02-20 15:17:18: Wafer transfer lockup

slee at snf.stanford.edu slee at snf.stanford.edu
Thu Feb 20 03:17:19 PST 2003


Wafer transfer sequence was activated while a cleanroom wipe got under the cover lid.
Then, the machine got confused and software got frozen.  Wafer trasfer does not response anymore.
Nancy tried reboot the computer, but it did not help.
Sorry for the inconvenient.
Shi-Sheng
slee at snf




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