Shutdown stsetch 2003-02-28 06:15:59: Report Clear for stsetch

booth at snf.stanford.edu booth at snf.stanford.edu
Fri Feb 28 08:03:24 PST 2003


opened chamber & cleaned up wafer piece
Replaced Helium lip seal & seal clip
Ran 30 min O2 clean - chamber needs to be seasoned
before regular use.




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