February 2003 Archives by date

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Starting: Fri Feb 14 09:00:23 PST 2003
Ending: Fri Feb 28 08:03:24 PST 2003
Messages: 14

• Problem stsetch 2003-02-14 21:00:22: pressure deviation, excessive pump down time   daesung at snf.stanford.edu
• Shutdown stsetch 2003-02-15 10:30:12: found software shutdown   amyers at snf.stanford.edu
• Shutdown stsetch 2003-02-15 10:30:12: found software shutdown   booth at snf.stanford.edu
• Shutdown stsetch 2003-02-18 07:50:34: found wafer piece in chamber   booth at snf.stanford.edu
• Problem stsetch 2003-02-14 21:00:22: pressure deviation, excessive pump down time   booth at snf.stanford.edu
• Shutdown stsetch 2003-02-18 07:50:34: found wafer piece in chamber   mislam at snf.stanford.edu
• Shutdown stsetch 2003-02-20 15:17:18: Wafer transfer lockup   slee at snf.stanford.edu
• Shutdown stsetch 2003-02-20 15:17:18: Wafer transfer lockup   cbaxter at snf.stanford.edu
• Problem stsetch 2003-02-28 05:27:11: Chip in Chamber   zappe at snf.stanford.edu
• Problem stsetch 2003-02-28 05:33:36: Report Problem for stsetch   lindaw at snf.stanford.edu
• Shutdown stsetch 2003-02-28 06:15:59: Report Shutdown for stsetch   lindaw at snf.stanford.edu
• Problem stsetch 2003-02-28 05:33:36: Report Clear for stsetch   booth at snf.stanford.edu
• Problem stsetch 2003-02-28 05:27:11: Report Clear for stsetch   booth at snf.stanford.edu
• Shutdown stsetch 2003-02-28 06:15:59: Report Clear for stsetch   booth at snf.stanford.edu

Last message date: Fri Feb 28 08:03:24 PST 2003
Archived on: Fri Jan 11 13:11:10 PST 2013

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