From latta at snf.stanford.edu Tue Jan 7 10:58:17 2003 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jan 7, 2003 10:58:17 AM Subject: Shutdown stsetch 2002-12-20 14:39:44: turbo does not match problem Message-ID: Test run after shutdown; DEEP for 0010:00 gives etchrate of 1.25. A little less than usual. Chamber pressures quite low, 16mT and 34mT intsead of 18 and 40. Released to general public. From latta at snf.stanford.edu Tue Jan 7 10:58:26 2003 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jan 7, 2003 10:58:26 AM Subject: Shutdown stsetch 2002-12-20 14:39:44: turbo does not match problem Message-ID: Test run after shutdown; DEEP for 0010:00 gives etchrate of 1.25. A little less than usual. Chamber pressures quite low, 16mT and 34mT intsead of 18 and 40. Released to general public. From kenney at snf.stanford.edu Mon Jan 13 10:49:45 2003 From: kenney at snf.stanford.edu (kenney at snf.stanford.edu) Date: Jan 13, 2003 10:49:45 AM Subject: Shutdown stsetch 2003-01-13 10:49:44: broke wafer in machine Message-ID: The wafer cracked - about one quarter left in process chamber From quickwin at snf.stanford.edu Mon Jan 13 12:57:01 2003 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Jan 13, 2003 12:57:01 PM Subject: Comment stsetch 2003-01-13 12:57:01: Please remember to clean the polymer buildup Message-ID: Hi there, Please remember to clean the polymer buildup from the wafer pedestal, now that the chamber is being opened. I am beginning to notice polymer on the back of my etched wafers yesterday. From booth at snf.stanford.edu Mon Jan 13 03:44:31 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 13, 2003 3:44:31 PM Subject: Shutdown stsetch 2003-01-13 10:49:44: broke wafer in machine Message-ID: Chris Kennys wafer was only 300 microns thick, this probably contributed to breakage From latta at snf.stanford.edu Mon Jan 13 04:12:49 2003 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jan 13, 2003 4:12:49 PM Subject: Shutdown stsetch 2003-01-13 16:12:48: Clamp finger broken off. Message-ID: One Clamp finger broke off during O2 clean. From cbaxter at snf.stanford.edu Mon Jan 13 07:43:54 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 13, 2003 7:43:54 PM Subject: Shutdown stsetch 2003-01-13 16:12:48: Clamp finger broken off. Message-ID: changed broken clamp finger From disney at snf.stanford.edu Thu Jan 23 11:01:16 2003 From: disney at snf.stanford.edu (disney at snf.stanford.edu) Date: Jan 23, 2003 11:01:16 AM Subject: Shutdown stsetch 2003-01-23 11:01:15: ICP process failed - communications lost Message-ID: STS program will not let me process or unload wafer From booth at snf.stanford.edu Thu Jan 23 11:45:22 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 23, 2003 11:45:22 AM Subject: Shutdown stsetch 2003-01-23 11:01:15: ICP process failed - communications lost Message-ID: reset system software & unloaded dummy wafer from etch chamber - system OK again. From wittbrod at snf.stanford.edu Wed Jan 29 08:28:44 2003 From: wittbrod at snf.stanford.edu (wittbrod at snf.stanford.edu) Date: Jan 29, 2003 8:28:44 AM Subject: Comment stsetch 2003-01-29 08:28:43: holder: there is only 1 useable o-ring for the holder. Message-ID: From booth at snf.stanford.edu Thu Jan 30 10:56:37 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 30, 2003 10:56:37 AM Subject: Shutdown stsetch 2003-01-30 10:56:33: SF6 bottle change Message-ID: From booth at snf.stanford.edu Thu Jan 30 11:19:49 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 30, 2003 11:19:49 AM Subject: Shutdown stsetch 2003-01-30 10:56:33: SF6 bottle change Message-ID: new SF6 bottle installed.