Shutdown stsetch 2002-12-20 14:39:44: turbo does not match problem

latta at snf.stanford.edu latta at snf.stanford.edu
Tue Jan 7 10:58:17 PST 2003


Test run after shutdown; DEEP for 0010:00 gives 
etchrate of 1.25.  A little less than usual.  Chamber pressures
quite low, 16mT and 34mT intsead of 18 and 40.
Released to general public.




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