Shutdown stsetch 2002-12-20 14:39:44: turbo does not match problem

latta at latta at
Tue Jan 7 10:58:26 PST 2003

Test run after shutdown; DEEP for 0010:00 gives 
etchrate of 1.25.  A little less than usual.  Chamber pressures
quite low, 16mT and 34mT intsead of 18 and 40.
Released to general public.

More information about the stsetch-pcs mailing list