Shutdown stsetch 2003-01-13 10:49:44: broke wafer in machine

kenney at snf.stanford.edu kenney at snf.stanford.edu
Mon Jan 13 10:49:45 PST 2003

Previous message: Shutdown stsetch 2003-01-13 16:12:48: Clamp finger broken off.
Next message: Shutdown stsetch 2003-01-13 10:49:44: broke wafer in machine
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

The wafer cracked - about one quarter left in process chamber

Previous message: Shutdown stsetch 2003-01-13 16:12:48: Clamp finger broken off.
Next message: Shutdown stsetch 2003-01-13 10:49:44: broke wafer in machine
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch-pcs mailing list