Comment stsetch 2003-01-13 12:57:01: Please remember to clean the polymer buildup

quickwin at snf.stanford.edu quickwin at snf.stanford.edu
Mon Jan 13 12:57:01 PST 2003


Hi there,
Please remember to clean the polymer buildup from the wafer pedestal, now that the chamber is being opened. 
I am beginning to notice polymer on the back of my etched wafers yesterday. 




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