Shutdown stsetch 2003-01-13 16:12:48: Clamp finger broken off.
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Mon Jan 13 07:43:54 PST 2003
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Shutdown stsetch 2003-01-13 16:12:48: Clamp finger broken off.
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Shutdown stsetch 2003-01-13 10:49:44: broke wafer in machine
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changed broken clamp finger
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Shutdown stsetch 2003-01-13 16:12:48: Clamp finger broken off.
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Shutdown stsetch 2003-01-13 10:49:44: broke wafer in machine
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