Shutdown stsetch 2003-07-07 19:59:03: Report Clear for stsetch

booth at snf.stanford.edu booth at snf.stanford.edu
Tue Jul 8 11:31:05 PDT 2003


cleaned out broken wafer of YETAO from etch chamber
and LoadLock.  Wafer appears to have broken during
attempt to unload.  Wafer piece measures ~380 microns
thick, and had been etched on BOTH SIDES.
Perhaps the silicon that was left was too thin to withstand
the Helium pressure & the mechanical clamp fingers?




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