Comment stsetch 2003-07-10 17:13:44: Report Comment for stsetch

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Thu Jul 10 05:13:44 PDT 2003


wafer broke while unloading. vented chamber and 
pieces of broken wafer chips on load lock and chamber.
don't know how it broke. chamber is cleaned and i ran
o2 plasma




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