From hanjun at snf.stanford.edu Thu Jun 5 12:27:53 2003 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Jun 5, 2003 12:27:53 AM Subject: Problem stsetch 2003-06-05 00:27:52: Report Problem for stsetch Message-ID: S/W was unstable, and got out of the process manager mode. Rebooted the S/W. Didn't know what the password was. There seemed no problem in the machine itself.. Thanks! From cbaxter at snf.stanford.edu Thu Jun 5 08:00:16 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 5, 2003 8:00:16 AM Subject: Shutdown stsetch 2003-06-05 08:00:15: Report Shutdown for stsetch Message-ID: system should be on shutdown. pc is locked up and wafer inside the chamber From cbaxter at snf.stanford.edu Thu Jun 5 10:18:18 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 5, 2003 10:18:18 AM Subject: Shutdown stsetch 2003-06-05 08:00:15: Report Clear for stsetch Message-ID: removed wafer from chamber and reboot oc From cbaxter at snf.stanford.edu Thu Jun 5 10:18:51 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 5, 2003 10:18:51 AM Subject: Problem stsetch 2003-06-05 00:27:52: Report Clear for stsetch Message-ID: removed wafer and reboot pc From wtpark at snf.stanford.edu Thu Jun 5 12:45:19 2003 From: wtpark at snf.stanford.edu (wtpark at snf.stanford.edu) Date: Jun 5, 2003 12:45:19 PM Subject: Problem stsetch 2003-06-05 12:45:19: Report Problem for stsetch Message-ID: software unstable need administrator password to start From wtpark at snf.stanford.edu Thu Jun 5 12:48:55 2003 From: wtpark at snf.stanford.edu (wtpark at snf.stanford.edu) Date: Jun 5, 2003 12:48:55 PM Subject: Shutdown stsetch 2003-06-05 12:48:55: Report Shutdown for stsetch Message-ID: can't restart system. From cbaxter at snf.stanford.edu Thu Jun 5 01:59:48 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 5, 2003 1:59:48 PM Subject: Shutdown stsetch 2003-06-05 12:48:55: Report Clear for stsetch Message-ID: hard reset system and recovered wafer From cbaxter at snf.stanford.edu Thu Jun 5 01:59:57 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 5, 2003 1:59:57 PM Subject: Problem stsetch 2003-06-05 12:45:19: Report Clear for stsetch Message-ID: From ycfu at snf.stanford.edu Wed Jun 11 10:56:42 2003 From: ycfu at snf.stanford.edu (ycfu at snf.stanford.edu) Date: Jun 11, 2003 10:56:42 AM Subject: Shutdown stsetch 2003-06-11 10:56:40: Report Shutdown for stsetch Message-ID: small piece inside the chamber From booth at snf.stanford.edu Wed Jun 11 02:39:18 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 11, 2003 2:39:18 PM Subject: Shutdown stsetch 2003-06-11 10:56:40: Report Clear for stsetch Message-ID: Opened Chamber to remove wafer on alum carrier. Alum carrier was glued to cathode - I pried it off. What appear to be globs of polymer? were on the cathode & on the back of the alum carrier. I removed the cathode cap & scrubbed it clean in the manit. sink. Wafer that was on alum carrrier was blackened & nasty looking. Was a sample taped to this wafer??? What is this process?? Nancy will check with ycfu. From rmartin at snf.stanford.edu Thu Jun 19 06:52:47 2003 From: rmartin at snf.stanford.edu (rmartin at snf.stanford.edu) Date: Jun 19, 2003 6:52:47 AM Subject: Shutdown stsetch 2003-06-19 06:52:47: Report Shutdown for stsetch Message-ID: From booth at snf.stanford.edu Thu Jun 19 08:54:21 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 19, 2003 8:54:21 AM Subject: Shutdown stsetch 2003-06-19 06:52:47: Report Clear for stsetch Message-ID: Opened etch chamber & cleaned out broken wafer pieces. Discussed with Roy issues re: preparing & loading wafers. From harshal at snf.stanford.edu Sun Jun 22 11:37:14 2003 From: harshal at snf.stanford.edu (harshal at snf.stanford.edu) Date: Jun 22, 2003 11:37:14 PM Subject: Shutdown stsetch 2003-06-22 23:37:14: Report Shutdown for stsetch Message-ID: wafer broken inside the process chamber. holder used to etch down to 100 um but the wafer cracked.. stoppped immediately. From booth at snf.stanford.edu Mon Jun 23 08:54:49 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 23, 2003 8:54:49 AM Subject: Shutdown stsetch 2003-06-22 23:37:14: Report Clear for stsetch Message-ID: cleaned up broken wafer. Loaded dummy wafer & ran 45 min O2clean recipe. From ntkjdmpxxx at aci.com Fri Jun 20 09:59:25 2003 From: ntkjdmpxxx at aci.com (jgtnr) Date: Sat, 21 Jun 2003 00:59:25 +0800 Subject: =?GB2312?B?tKvV5si6t6I=?= Message-ID: <20030620165926.9EF2664E03A@WWW-FE7CA4585AE.com> An HTML attachment was scrubbed... URL: