Shutdown stsetch 2003-06-05 08:00:15: Report Clear for stsetch
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Thu Jun 5 10:18:18 PDT 2003
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Shutdown stsetch 2003-06-05 08:00:15: Report Shutdown for stsetch
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Problem stsetch 2003-06-05 00:27:52: Report Clear for stsetch
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removed wafer from chamber and reboot oc
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Shutdown stsetch 2003-06-05 08:00:15: Report Shutdown for stsetch
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Problem stsetch 2003-06-05 00:27:52: Report Clear for stsetch
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