From quickwin at snf.stanford.edu Mon Mar 10 11:23:10 2003 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Mar 10, 2003 11:23:10 AM Subject: Problem stsetch 2003-03-10 11:23:09: photoresist erosion too much for me Message-ID: After the chiller temperature change, the resist erosion rate becomes too much for me as I found out yesterday. On a 100 micron feature, it enlarged by 2 micron, which renders my wafers useless. Please change the chiller temperature back. From cbaxter at snf.stanford.edu Tue Mar 11 05:07:29 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 11, 2003 5:07:29 PM Subject: Problem stsetch 2003-03-10 11:23:09: Report Clear for stsetch Message-ID: we can't change chiller setpoint. need to talk it over with process From mislam at snf.stanford.edu Mon Mar 17 08:46:29 2003 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Mar 17, 2003 8:46:29 AM Subject: Shutdown stsetch 2003-03-17 08:46:28: Report Shutdown for stsetch Message-ID: 'Communication error' warning window poped up during process. Machine status window dispeared and a text based parameter window poped up. From booth at snf.stanford.edu Mon Mar 17 08:47:56 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 17, 2003 8:47:56 AM Subject: Shutdown stsetch 2003-03-17 08:46:28: Report Clear for stsetch Message-ID: had to restart system software to clear communication fault. Unloaded Muhammads wafer from etch chamber. From bwacker at snf.stanford.edu Mon Mar 17 10:09:04 2003 From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu) Date: Mar 17, 2003 10:09:04 AM Subject: Problem stsetch 2003-03-17 10:09:03: Report Problem for stsetch Message-ID: System software has stopped From booth at snf.stanford.edu Mon Mar 17 10:31:06 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 17, 2003 10:31:06 AM Subject: Problem stsetch 2003-03-17 10:09:03: Report Clear for stsetch Message-ID: deleted old logfiles to free up disk space. Restarted system software. From bwacker at snf.stanford.edu Mon Mar 17 10:35:25 2003 From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu) Date: Mar 17, 2003 10:35:25 AM Subject: Shutdown stsetch 2003-03-17 10:35:24: Report Shutdown for stsetch Message-ID: I loaded my wafer and it shuttered in to the pieces From booth at snf.stanford.edu Mon Mar 17 12:36:10 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 17, 2003 12:36:10 PM Subject: Shutdown stsetch 2003-03-17 10:35:24: Report Clear for stsetch Message-ID: Opened etch chamber & loadlock to clean up broken wafer of Barbara Wacker. Did not see any reason for this failure. From mislam at snf.stanford.edu Thu Mar 20 09:27:36 2003 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Mar 20, 2003 9:27:36 AM Subject: Shutdown stsetch 2003-03-20 09:27:34: Report Shutdown for stsetch Message-ID: Tiny Si piece in chamber From booth at snf.stanford.edu Thu Mar 20 12:50:28 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 20, 2003 12:50:28 PM Subject: Shutdown stsetch 2003-03-20 09:27:34: Report Clear for stsetch Message-ID: opened etch chamber & vacumed out small broken piece of Silicon. Loaded dummy wafer & ran 60 min of O2 clean. From booth at snf.stanford.edu Tue Mar 25 07:04:25 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 25, 2003 7:04:25 AM Subject: Shutdown stsetch 2003-03-25 07:04:24: Report Shutdown for stsetch Message-ID: Need short shutdown to add oil to pump. From booth at snf.stanford.edu Tue Mar 25 07:39:51 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 25, 2003 7:39:51 AM Subject: Shutdown stsetch 2003-03-25 07:04:24: Report Clear for stsetch Message-ID: added oil to dry pump. From amyers at snf.stanford.edu Thu Mar 27 10:57:05 2003 From: amyers at snf.stanford.edu (amyers at snf.stanford.edu) Date: Mar 27, 2003 10:57:05 AM Subject: Shutdown stsetch 2003-03-27 10:57:04: Report Shutdown for stsetch Message-ID: Noticed STS was not being used. Hit unload to remove a wafer that ERICP had left in the tool. The transfer is "waiting for chamber" and load arm is not moving. Nancy was in the area and she can't figure out the problem either. From booth at snf.stanford.edu Thu Mar 27 03:39:08 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 27, 2003 3:39:08 PM Subject: Shutdown stsetch 2003-03-27 10:57:04: Report Clear for stsetch Message-ID: comm. fault & turbo had difficulty getting up to speed. Swapped for used vac-operated foreline safety valve but got worse. Removed valve & put bellows in foreline. Turbo runs normally again. Need to rebuild foreline safety valve.