Problem stsetch 2003-03-10 11:23:09: photoresist erosion too much for me

quickwin at snf.stanford.edu quickwin at snf.stanford.edu
Mon Mar 10 11:23:10 PST 2003


After the chiller temperature change, the resist erosion rate becomes too much for me as I found out yesterday. On a 100 micron feature, it enlarged by 2 micron, which renders my wafers useless. Please change the chiller temperature back.




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