Shutdown stsetch 2003-03-17 10:35:24: Report Clear for stsetch

booth at snf.stanford.edu booth at snf.stanford.edu
Mon Mar 17 12:36:10 PST 2003


Opened etch chamber & loadlock to clean up 
broken wafer of Barbara Wacker.
Did not see any reason for this failure.




More information about the stsetch-pcs mailing list