Shutdown stsetch 2003-03-27 10:57:04: Report Shutdown for stsetch

amyers at snf.stanford.edu amyers at snf.stanford.edu
Thu Mar 27 10:57:05 PST 2003


Noticed STS was not being used.  Hit unload to remove a wafer that ERICP had left in the tool.  The transfer is "waiting for chamber" and load arm is not moving.  Nancy was in the area and she can't figure out the problem either.




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